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7.3.3 Plasmas

More control can be achieved in vapour deposition if a plasma is generated. A plasma is simply a gas where a proportion of the molecules have been ionised. The ions remain in an uneasy equilibrium with the electrons they have released, prevented from recombining only because the electrons are hot and fast-moving, and so are difficult to trap.

Plasmas are widely used in materials processing, with pressure ranging from 10−3 mbar to 1 mbar and typically up to 1% of the molecul
Author(s): The Open University

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Copyright © 2016 The Open University

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