7.4.5 Atomic layer deposition (ALD)

For very thin conformal films, where rate is unimportant but precise thickness control is critical, a form of CVD allows deposition one monolayer at a time. One precursor gas is introduced into the chamber, which is then pumped away leaving only a monolayer adsorbed onto the wafer and chamber walls. The second precursor gas can then be supplied to complete the reaction at the surface, and then this gas is pumped away along with any gaseous reaction products. This cycle is repeated several tim
Author(s): The Open University

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Author(s): Jeff Gold,Leeds Metropolitan University

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