Cryo FIB-SEM detail
FEI Quanta 200 3D Dual Beam FIB-SEM
- Thermal emission Electron Optics with dual-anode source emission geometry and through-the-lens differential pumping
- Resolution: 3.5 nm @ 30 kV, 3.5 nm @ 30 kV @ ESEM mode, < 15 nm @ 3 kV @ low vacuum
- High-resolution (field emission) Ion Optics (Magnum™ column) with high-volume milling capabilities
- ESEM™ differential pumping variable pressure vacuum system (oil-free) with three vacuum modes: high vacuum, low vacuum and ESEM
- Gaseous secondary and backscattered electron detectors for imaging and analysis in a gaseous chamber environment
- Gas Chemistry technology for enhanced milling rates including Selective Carbon Mill
- High-precision specimen goniometer with 50mm travel along the x and y axes
- Automation serving unattended sectioning with full access to E-beam, I-beam, patterning and gas chemistry functionality
- Tungsten metal deposition, Carbon deposition, Insulator enhanced etch (XeF2) and Selective Carbon Mill gas injectors (2 fitted at one time)
Omniprobe Model 100.7 in-situ nanomanipulator
The Model 100.7 is Omniprobe's in-situ nanomanipulator with an analog electronic control system. The 100.7 is ideal for a variety of in-situ probing and manipulation applications for which computer automation is not required. The Model 100.7 provides sub-100nm performance with a simple motion control system.
PP2000 Cryo-SEM Preparation System
The sample is rapidly cooled and transferred under vacuum to the cold stage of the preparation chamber, which is mounted on to the SEM chamber. The preparation chamber is pumped by a specially designed turbomolecular pumping system. The sample can be fractured, etched to reveal greater detail and coated with metal by sputtering or with carbon by evaporation.
Finally, the sample can be loaded under vacuum into the SEM chamber where it is easily located on a cold stage specifically tailored to the SEM. At all stages of the procedure the sample is maintained at a "safe" temperature of lower than -140°C
CHE2000UPG Vacuum isolated off-column cooling Dewar
12-litre Liquid Nitrogen Dewar and Heat exchanger assembly that extends the run time of the Cryo-SEM kit to over 12 hours.
Oxford Instruments integrated INCA Energy 250 Microanalysis System
For EDX elemental spectra and mapping.
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